Zhengzhou Protech Technology Co., Ltd
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Zhengzhou Protech Technology Co., Ltd
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Low Vacuum CVD System

Low Vacuum CVD System


Description:Product Name Low Vacuum CVD System Model KJ-T1200-S60-CVD Tube furnace part Furnace structure Double-layer shell structure

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Product Name Low Vacuum CVD System
Model PT-T1200-S60-CVD
Tube furnace part
Furnace structure Double-layer shell structure, equipped with cold air system, automatic cooling furnace shell temperature does not exceed 45 ℃
Furnace Material High-quality high-purity alumina polycrystalline fiber solidified furnace with vacuum adsorption molding technology from Japan. The material has good thermal insulation performance, high reflectivity, and balanced temperature field.
Max.Temperature 1200℃
Continuous working temperature 1100℃
Heating rate Recommended ≤10°C/min, the fastest heating rate is 20°C/min
Furnace tube material High purity quartz tube
Furnace tube size OD:60mm* ID:54mm * length 1200mm
The instrument must be plugged in before use to prevent heat radiation
Heating zone length 220+220+220mm
flange Stainless steel sealing flange, easy to disassemble, precision needle valve is installed on the flange
Temperature Control System The temperature control system adopts artificial intelligence adjustment technology, with PID adjustment and self-tuning functions
1. Adopt PID method to adjust temperature control, and can set 30 heating and cooling programs
2. Temperature control accuracy ±1ºC
3. With over-temperature protection and burnout protection
4. The instrument has the function of temperature self-tuning
Heating element Molybdenum alloy resistance wire
Temperature measuring element K type thermocouple
Working power AC220V,50/60Hz
Rated power 5KW
Air inlet and outlet The flange contains vacuum connection port, air inlet and outlet
Air system part
Mass flowmeter Four-way precision mass flowmeter: digital display, automatic control of gas flow.
MFC1 range: 0-500 sccm (range optional)
MFC2 range: 0-500 sccm (range optional)
MFC3 range: 0-500 sccm (range optional)
MFC4 range: 0-500 sccm (range optional)
Gas circuit: 4 channels
Vacuum system part
vacuum pump DRV10 rotary vane pump pumping

Transaction process

  After-sales Service

1.We provide one year warranty for our equipment (Except the quick-wear part),Equipment damage or malfunction during the guarantee period due to equipment quality reasons, all be free maintenance.After the warranty expires, still offer lifetime and high quality service.

2.In case of failure in the process of equipment used, our company will make a deal as soon as possible, to ensure the normal operation of equipment.

3.Our company provide free equipment operation training and simple troubleshooting and maintenance training.

4.My company's technical staff can provide door-to-door service (product installation, debugging, maintenance, technical advice and instructions, etc.).

5.Our company provides transport services, packaging are carried out in accordance with the safety standard packing.Random complete technical data (user manual, maintenance manuals, relevant materials and accessories, random tools, etc.).

6.All the equipment has the CE certificate.

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