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Model：PT-TCVD1100-S40CK2
Description：Vertical structure, used for coating, fluidized bed experiments, CVD rapid coating, powder heat treatment under atmosphere and vacuum conditions, mainly used for experiments and production related to vapor deposition in universities, research centers, and production enterprises.
Vertical structure, used for coating, fluidized bed experiments, CVD rapid coating, powder heat treatment under atmosphere and vacuum conditions, etc. The vertical dual temperature zone CVD coating tube furnace mainly consists of a 1200 degree dual temperature zone tube furnace, a 3-channel mass flow meter gas supply system, a 2L/S vacuum pump and related connectors; Directional wheels and universal wheels are installed below the equipment, which occupies a small area and can be flexibly moved. This equipment is suitable for CVD process and is mainly used for experiments and production related to vapor deposition in universities, research centers, and production enterprises. Click to view more CVD furnaces!
Actual photo of vertical dual temperature zone CVD coating tube furnace
1. Multi segment intelligent PID program temperature control: The temperature control system adopts PID regulation, and multiple segments of "time temperature curve" can be set arbitrarily, with 30 programmable steps.
2. Vertical openable structure: The double-layer shell vertical openable structure is convenient for taking and placing furnace tubes, equipped with an air cooling system, and the temperature of the furnace shell is kept within a safe range.
3. Excellent dynamic sealing system: stainless steel metal flange, equipped with valves and related interfaces, easy to disassemble and assemble, capable of vacuuming, and connected to 3 types of gas sources to micro positive pressure.
| Product name | PT-TCVD1100-S40CK2 Model Vertical tube furnace CVD system |
| 1200 degree fluidized tube furnace | |
| Furnace chamber model | Dual temperature zone vertical opening structure, easy to take and place the furnace tube |
| Chamber material | Alumina refractory fiber |
| Heating element | High quality heating wire |
| Max. temperature | 1200℃ |
| Working temperature | ≤1100℃ |
| Heating rate | 0-10℃/min |
| Heating zone | double zone（Independent temperature control for each temperature zone） |
| Furnace tube material | Customized high purity quartz |
| Furnace tube outer diameter | 40mm(Can be customized according to customer needs) |
| The length of the furnace tube is approx. | 1100mm(Can be customized according to customer needs) |
| Sealing method | A set of customized stainless steel vacuum flanges including sealing rings |
| Control mode | Touch screen multi-stage intelligent PID program temperature control, sintering data can be recorded and exported in excel format |
| Temperature curve | Multiple "time-temperature curves" can be set arbitrarily |
| Temperature measuring element | N type thermocouple temperature measurement |
| Air supply system: 3-way mass flow control system | |
| Working temperature | 5--45℃ |
| gas channel | Can connect 3 kinds of air sources to micro positive pressure at the same time |
| flow meter | Mass flow meter (other ranges optional) |
| A channel range | 1SLM |
| B channel range | 1SLM |
| c channel range | 1SLM |
| Air line pressure | -0.1～0.15 MPa |
| Accuracy | ±1%F.S |
| Shut-off valve | Stainless steel material |
| Gas connection pipe | 1/4 stainless steel pipe |
| Vacuum system | |
| Vacuum pump | 2L/S speed vacuum pump with silicone hose can quickly replace the gas in the furnace tube |
Actual photo of vertical dual temperature zone CVD coating tube furnace
Transaction process
After-sales Service
1.We provide one year warranty for our equipment (Except the quick-wear part),Equipment damage or malfunction during the guarantee period due to equipment quality reasons, all be free maintenance.After the warranty expires, still offer lifetime and high quality service.
2.In case of failure in the process of equipment used, our company will make a deal as soon as possible, to ensure the normal operation of equipment.
3.Our company provide free equipment operation training and simple troubleshooting and maintenance training.
4.My company's technical staff can provide door-to-door service (product installation, debugging, maintenance, technical advice and instructions, etc.).
5.Our company provides transport services, packaging are carried out in accordance with the safety standard packing.Random complete technical data (user manual, maintenance manuals, relevant materials and accessories, random tools, etc.).
6.All the equipment has the CE certificate.
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