Description：Touch Screen CVD is a tube furnace with 80mm diameter alumina tube and three channels Mass Flow Meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion.
|Model||PT-T1600 CVD with 3 MFC Gas channels|
|Tube Furnace||Display||LCD Touch Screen|
|Max. Temperature||1600℃ for short time|
|Continuous Working Temp.||≤1500℃|
|Heating Rate||Suggestion: 0~10℃/min|
|Heating Element||MoSi2 Heaters|
|Temperature Control Accuracy||±1℃|
|Tube Size||80x1000mm (OD x L)|
|Material: Alumina Tube|
|Tube Block||Two fibrous ceramic blocks are included for blocking heat radiation from inside tube (Ceramic blocks must be fully inserted into the furnace chamber before heating).|
|Temperature Control||PID automatic control via SCR power control|
|Program and Ramps||30 steps programmable|
Stainless Steel vacuum flange with valves
|Power||220V, 50 Hz, single phase at max.6KW|
Mass Flow Meters
(LCD Touch Screen)
Three precision mass flow meters :
MFC 1: Gas flow range from 0~100 sccm
MFC 2: Gas flow range from 0~200 sccm
MFC 3: Gas flow range from 0~200 sccm
(Gas flow range can be according to your requirement)
One gas mixing tank is installed on bottom case with 3 stainless steel needle valves is installed on left side of bottom case to control 3 type gases mixing manually
1.We provide one year warranty for our equipment (Except the quick-wear part),Equipment damage or malfunction during the guarantee period due to equipment quality reasons, all be free maintenance.After the warranty expires, still offer lifetime and high quality service.
2.In case of failure in the process of equipment used, our company will make a deal as soon as possible, to ensure the normal operation of equipment.
3.Our company provide free equipment operation training and simple troubleshooting and maintenance training.
4.My company's technical staff can provide door-to-door service (product installation, debugging, maintenance, technical advice and instructions, etc.).
5.Our company provides transport services, packaging are carried out in accordance with the safety standard packing.Random complete technical data (user manual, maintenance manuals, relevant materials and accessories, random tools, etc.).
6.All the equipment has the CE certificate.
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