Zhengzhou Protech Technology Co., Ltd
phone +86 18037178440
email info@lab-furnace.com
Zhengzhou Protech Technology Co., Ltd
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Touch Screen CVD Furnace

Touch Screen CVD Furnace

Model:PT-T1600 CVD

Description:Touch Screen CVD is a tube furnace with 80mm diameter alumina tube and three channels Mass Flow Meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion.

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Brief Introduction:  
    PT-T1600 Touch Screen CVD is a tube furnace with 80mm diameter alumina tube and three channels Mass Flow Meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion. 
Technical Parameter:
Model PT-T1600 CVD with 3 MFC Gas channels
Tube Furnace Display LCD Touch Screen
Max. Temperature 1600℃ for short time
Continuous Working Temp. ≤1500℃
Heating Rate Suggestion: 0~10℃/min
Temperature Zone 300mm
Heating Element MoSi2 Heaters
Thermocouple B Type
Temperature Control Accuracy ±1℃
Tube Size 80x1000mm (OD x L)
Material:  Alumina Tube
Tube Block Two fibrous ceramic blocks are included for blocking heat radiation from inside tube (Ceramic blocks must be fully inserted into the furnace chamber before heating).
Temperature Control PID automatic control via SCR power control
Program and Ramps 30 steps programmable
Vacuum Flange Stainless Steel vacuum flange with valves
Power 220V, 50 Hz, single phase at max.6KW
Mass Flow Meters
(LCD Touch Screen)
Three precision mass flow meters :
MFC 1: Gas flow range from 0~100 sccm
MFC 2: Gas flow range from 0~200 sccm
MFC 3: Gas flow range from 0~200 sccm
(Gas flow range can be according to your requirement)
One gas mixing tank is installed on bottom case with 3 stainless steel needle valves is installed on left side of bottom case to control 3 type gases mixing manually

Transaction process

  After-sales Service

1.We provide one year warranty for our equipment (Except the quick-wear part),Equipment damage or malfunction during the guarantee period due to equipment quality reasons, all be free maintenance.After the warranty expires, still offer lifetime and high quality service.

2.In case of failure in the process of equipment used, our company will make a deal as soon as possible, to ensure the normal operation of equipment.

3.Our company provide free equipment operation training and simple troubleshooting and maintenance training.

4.My company's technical staff can provide door-to-door service (product installation, debugging, maintenance, technical advice and instructions, etc.).

5.Our company provides transport services, packaging are carried out in accordance with the safety standard packing.Random complete technical data (user manual, maintenance manuals, relevant materials and accessories, random tools, etc.).

6.All the equipment has the CE certificate.

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