Zhengzhou Protech Technology Co., Ltd
phone +86 18037178440
email info@lab-furnace.com
Zhengzhou Protech Technology Co., Ltd
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High vacuum automatic rotary and tilt PECVD tube furnace

High vacuum automatic rotary and tilt PECVD tube furnace



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Part I: Standard Parts
Tube Furnace

Display LCD touch screen
Chamber Split type and upper part can be opened
Max. Temperature 1200℃ for short time
Continuous Woking Temp. ≤1100℃
Heating Rate Suggestion: 0~10℃/min (max. 20℃/min)
Temperature Zone 400mm
Heating Element Resistance wire with Mo
Thermocouple K type
Temperature Control
Tube Size
OD60mm x 100mm x 60mm
Tube Length :1600 mm
Temperature Control PID automatic control via SCR power control
Heating curves 30 steps programmable
Power 220V, 50 Hz, single phase
(or according to your requirements)
Customized Function Rotary and tilt
Tilt angle: 0-30° (suggestion:0-15°)
Tube rotation speed:  0-10r/min
Communicate Port
Control the temperature, mass flow rate, rotating speed and vacuum pump by computer.
Plasma RF Power supply
Output Power 5 -500W adjustable with ± 1% stability
RF frequency 13.56 MHz ±0.005% stability
Reflection Power 200W max.
Matching Automatic
RF Output Port 50 Ω, N-type, female
Noise <50 dB.
Cooling Air cooling.
Power 220V, 50Hz

Transaction process

  After-sales Service

1.We provide one year warranty for our equipment (Except the quick-wear part),Equipment damage or malfunction during the guarantee period due to equipment quality reasons, all be free maintenance.After the warranty expires, still offer lifetime and high quality service.

2.In case of failure in the process of equipment used, our company will make a deal as soon as possible, to ensure the normal operation of equipment.

3.Our company provide free equipment operation training and simple troubleshooting and maintenance training.

4.My company's technical staff can provide door-to-door service (product installation, debugging, maintenance, technical advice and instructions, etc.).

5.Our company provides transport services, packaging are carried out in accordance with the safety standard packing.Random complete technical data (user manual, maintenance manuals, relevant materials and accessories, random tools, etc.).

6.All the equipment has the CE certificate.

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