Description：PECVD tube furnace is widely used for depositing high-quality SiO2 films, Si3N4 films, diamond films, hard films, optical films, carbon nanotubes (CNT), graphene materials, etc.
|Product name||Tubular PECVD system (CE certification)|
|Slide tube furnace part|
|Heating zone length||300mm|
|Furnace tube size||diameter 120*1600mm|
|Temperature measuring element||K type thermocouple|
|Temperature Control System||30-segment PID microcomputer programmable automatic control|
|Insulation temperature control accuracy||±1℃|
|temperature protection||With over temperature and burnout protection function|
|Heating element||High resistance electric heating alloy wire OCr27A17Mo|
|Operating Voltage||AC220V single phase 50HZ|
|chamber material||Using polycrystalline fiber furnace material, the material has good thermal insulation performance, high reflectivity and balanced temperature field|
|sealing system||The furnace tube and the flange are squeezed and sealed with O-rings, which are easy to disassemble, can be disassembled repeatedly, and have good air tightness.|
|Furnace tube||High purity quartz tube|
|French||304 stainless steel sealing flange, installed mechanical pressure gauge and stainless steel globe valve, easy to disassemble and take out materials|
|Furnace structure||Cr-plated thick steel plate two-way slide rails can realize the movement of the tube furnace to achieve rapid heating and cooling|
|Furnace shell temperature||≤45℃|
|vacuum system part|
|name||DRV16 Rotary Vane Pump 4L/S|
|The main parameters||Ultimate vacuum degree 10Pa (including KF25 interface, vacuum baffle valve and movable box)|
|vacuum display||Resistance digital display vacuum gauge, display range standard atmospheric pressure--10-1pa|
|Air system part|
|name||Four-way mass flow meter|
|Gas line||four way|
|flow control||Digital display, each channel of gas contains a needle valve for separate control, and the gas flow is automatically controlled|
|Air inlet and outlet||Four in and one out, built-in precision mixing tank|
|link method||Double Ferrule Fitting|
|flow range||MFC1-MFC4：0-500sccm（range optional)|
|control precision||About ±1.5%F.S, different ranges, slightly different|
|Plasma radio frequency part|
|name||RF automatic matcher|
|Matching power range||0-500W|
|Normal working reflected power||＜3W|
|Matching power supply||AC220V/50-60HZ|
1.We provide one year warranty for our equipment (Except the quick-wear part),Equipment damage or malfunction during the guarantee period due to equipment quality reasons, all be free maintenance.After the warranty expires, still offer lifetime and high quality service.
2.In case of failure in the process of equipment used, our company will make a deal as soon as possible, to ensure the normal operation of equipment.
3.Our company provide free equipment operation training and simple troubleshooting and maintenance training.
4.My company's technical staff can provide door-to-door service (product installation, debugging, maintenance, technical advice and instructions, etc.).
5.Our company provides transport services, packaging are carried out in accordance with the safety standard packing.Random complete technical data (user manual, maintenance manuals, relevant materials and accessories, random tools, etc.).
6.All the equipment has the CE certificate.
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