Zhengzhou Protech Technology Co., Ltd
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Zhengzhou Protech Technology Co., Ltd
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Description:The PT-TPECVD1100-S80CK3 Automatic Rotary Tilt Tube PECVD System is used to handle metal powder coating process. It features functions for fully automatic swivel and tilt.

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Product Introduction:

The PT-TPECVD1100-S80CK3 tube PECVD system utilizes microwave or radio frequency to ionize gas containing atoms composed of thin films, forming a plasma locally. The plasma has strong chemical activity and is prone to reactions, depositing the desired thin film on the substrate. The system is mainly used in metal powder coating and can rotate and tilt. The PT-TPECVD1100-S80CK3 tube PECVD system belongs to one of the pecvd furnace.


Realistic view of automatic rotating inclined tube PECVD system
Realistic view of automatic rotating inclined tube PECVD system


1. Good air tightness
The 1200 ℃ tube PECVD system adopts an O-ring compression seal between the furnace tube and the flange, which is easy to remove and can be repeatedly removed. It has good airtightness and magnetic fluid sealing, ensuring that vacuum can be extracted during the rotation process.

2. Temperature field equilibrium
Adopting polycrystalline fiber furnace material, the material has good insulation performance, high reflectivity, and a balanced temperature field.

3. Rotatable and tilted
The 1200 ℃ tube PECVD system mainly adopts J-T1200 rotary tube furnace, which can tilt and rotate 360 degrees, with a speed of 0-15 revolutions (adjustable speed); The inclination angle is 0-15 ° (adjustable) for easy feeding and discharging, and a lifting plate is installed in the pipeline to evenly heat the material in the furnace.

4.Temperature control protection
Equipped with ultra mild couple breaking protection function.

Detail Specification:

Product name Automatic Rotary Tilt Tube PECVD System (CE Cert)
Rotary Tube Furnace Part
Model PT-TPECVD1100-S80CK3
Heating zone length 660mm(220+220+220mm Three temperature zone)
Constant temperature zone length 400mm
Furnace tube material High-purity quartz tube (reducing tube)
Furnace tube size  Reducer
Dimensions at both ends OD: 80mm* 400mm
Middle size OD: 150mm* 400mm
The total length is 1200mm, the middle part of the furnace tube is welded with the lifting plate
Working temperature ≦1100℃
Max.temperature 1200℃
Temperature measuring element 3 K-type thermocouples for temperature control
Temperature Control System 7-inch touch screen display, 16-segment storable curves, 30-segment PID microcomputer programmable automatic control, can store and copy data
Insulation temperature control accuracy ±1℃
temperature protection With over temperature and burnout protection function
Heating rate 0-20ºC/min
Heating element Alloy resistance wire
Operating Voltage AC 220V single-phase 50HZ
Maximum power 5KW(subject to actual power )
Furnace chamber material Using polycrystalline fiber furnace material, the material has good thermal insulation performance, high reflectivity and balanced temperature field
sealing system The furnace tube and the flange are squeezed and sealed with O-rings, which are easy to disassemble, can be disassembled repeatedly, and have good air tightness.
Flange Water-cooled sealing flange, installed mechanical pressure gauge and stainless steel globe valve, easy to disassemble and take out materials
inclined structure Can be tilted with an inclination angle of 0-15° (adjustable inclination angle) to facilitate material in and out
rotating structure Can rotate 360 degrees, speed 0-15 revolutions (speed adjustable)
The material is evenly heated in the furnace
Furnace shell temperature ≤45℃
vacuum system part
Name Molecular pump set
pump set Rotary vane pump + molecular pump
The main parameters The ultimate vacuum is 6.7*10-3Pa (including KF25 interface, vacuum baffle valve and movable box)
vacuum display Imported capacitive diaphragm vacuum gauge, corrosion-resistant, real-time display of vacuum degree
Vacuum display range Its measuring range is 1×105--1×10-5pa
rotary seal Magnetic fluid seal to ensure that vacuum can be pumped during rotation
Air system part
Name Three-way mass flow meter
Gas line Three-way 
flow control LCD touch screen control, digital display, each gas contains separate needle valve control, automatic gas flow control
Air inlet and outlet Three in and one out, built-in precision mixing tank
link method Double Ferrule Fitting
flow range MFC1-MFC3: 0-10SLM (range optional)
control precision About ±1.5%F.S, different ranges, slightly different
maximum withstand voltage 1.1Mpa
Working temperature 5℃-45℃
Plasma radio frequency part
Name RF automatic matcher
Model VERG-500+VENA-500
Matching power range 0-500W
working frequency 13.56MHZ+0.005%
Normal working reflected power <3W
match time <3S
transmission efficiency >90%
Use stability ±1%F.S
Matching power supply AC220V/50-60HZ
input connector N type
output connector
control mode Manual / Auto
Preset points can be set 7
Matching Impedance Range Real part 0-80Ω Imaginary part-j200-j200 (impedance can be adjusted according to load)
Matching size 340X230X130 MM
Provide related accessories 1 set of gas circuit, 1 set of radio frequency power supply, 1 set of vacuum pump group, 2 furnace plugs, 1 pair of sealing flanges, 1 piece of quartz tube, 2 pairs of sealing rings, 1 pair of high-temperature gloves, 1 piece of crucible hook, 1 piece of vacuum pump connecting pipe fittings Set, 1 hex wrench for disassembling the flange, 1 copy of warranty card manual, etc.

Realistic view of automatic rotating inclined tube PECVD system
Realistic view of automatic rotating inclined tube PECVD system

Transaction process

  After-sales Service

1.We provide one year warranty for our equipment (Except the quick-wear part),Equipment damage or malfunction during the guarantee period due to equipment quality reasons, all be free maintenance.After the warranty expires, still offer lifetime and high quality service.

2.In case of failure in the process of equipment used, our company will make a deal as soon as possible, to ensure the normal operation of equipment.

3.Our company provide free equipment operation training and simple troubleshooting and maintenance training.

4.My company's technical staff can provide door-to-door service (product installation, debugging, maintenance, technical advice and instructions, etc.).

5.Our company provides transport services, packaging are carried out in accordance with the safety standard packing.Random complete technical data (user manual, maintenance manuals, relevant materials and accessories, random tools, etc.).

6.All the equipment has the CE certificate.

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