Description：EQ-UNIPOL-160D machine is a bench-top precision double side lapping and polishing machine. It can lap and polish 4 pieces of wafers up to 2" in both side at the same time, and achieves TTV less than one micron in 2" diameter area. It is an idea tool to prepare Si, Ge and oxide single crystal wafer with 2" diameter or less in the laboratory.
|Lapping Plate Dimensions||225 x 94 x 15mm (Outer dia. x Arbor dia. x Thickness)|
|Weight of Upper Lapping Plate and Balance||5.5kg (3kg for balance weight)|
|Gearing Template Specification||z=54 m=1.5 dia.81mm (metric)|
|Number of Gearing Templates for Simultaneous Use||4|
|Largest Work Piece Size||Dia. 60mm; thickness 15mm|
|Accuracy of Fatness and Parallelism||0.001mm|
|Accuracy of Lapping and Polishing||+/-0.001mm|
|Surface Finish||> grade 10|
|Input Power||Single phase 220V|
Four pieces of gearing templates are required for double sides polishing. (MTI can provide the gearing template with various hole size at extra cost (~$30/template). One template can hold sample as the follows:
||Polishing template gear||4|
||Polymide polishing pad||2|
||Poromeric polishing pad||2|
||Axle key holders (pre-install in the upper polishing plate)||2|
||Ring feeding channel (pre-install in the upper polishing plate)||1|
1.We provide one year warranty for our equipment (Except the quick-wear part),Equipment damage or malfunction during the guarantee period due to equipment quality reasons, all be free maintenance.After the warranty expires, still offer lifetime and high quality service.
2.In case of failure in the process of equipment used, our company will make a deal as soon as possible, to ensure the normal operation of equipment.
3.Our company provide free equipment operation training and simple troubleshooting and maintenance training.
4.My company's technical staff can provide door-to-door service (product installation, debugging, maintenance, technical advice and instructions, etc.).
5.Our company provides transport services, packaging are carried out in accordance with the safety standard packing.Random complete technical data (user manual, maintenance manuals, relevant materials and accessories, random tools, etc.).
6.All the equipment has the CE certificate.