500W RF generator with match

Model：

Description：

Introduction:

500W RF Generator

series Auto RF Match is used into the vacuum thin film coating equipments for the processes such as plasma cleaning, plasma etching, magnetron sputtering, PECVD etc. The main function is to realize the auto matching function, and solves the technical vacancy.
Currently the domestic manufactures mainly utilize the hand operated RF Match. And it is not so convenient to use the hand operated RF Match. Continuous operation is needed to adjust the impedance of the RF Match to achieve the process goal. While, the auto match can fill up the gap and owns the features of speediness, automatism, reliability, high efficiency, accuracy, saving labor and time. The optional RF systematic detection module can real time detect the system’s forward power, reflect power, standing wave ratio, RF signal peak voltage, current, DC bias voltage, An in so doing it can make you detect and decrease the process variety.
Advantage:
1 Reliability & stability for long time
2 Real time reflect power test and control
3 Optimize design. Easy to install, use and repair
4 Broad range of matching, suitable for complicated load system
5 High efficiency in transmission, low noise, well shielding
6 Strict reliable test
Features:
Strengthened thin film plating and etching process
Optimized RF Match arithmetic to speed up the matching time
Reduce the standing-wave ratio and the reflect ratio utmost
Specification:

Power Output Range	0-500W
RF Operating Frequency	13.56MHZ
Reflect Power	≤3W
Matching time	≤3S
Transmission efficiency	＞90%
Power	AC220V/50-60HZ
RF input connector	N type
RF output connector	UHF
Control model	automatic or manual operation
Preset points	7
Matching impedance range	Real part 0-80Ω imaginary part -j200~ +j200 (can be adjusted according to load impedance)
Size	340X230X130 MM
Weight	5.5KG
Cooling method	Forced air

RF Matching Network

series Auto RF Match is used into the vacuum thin film coating equipments for the processes such as plasma cleaning, plasma etching, magnetron sputtering, PECVD etc. The main function is to realize the auto matching function, and solves the technical vacancy.
Currently the domestic manufactures mainly utilize the hand operated RF Match. And it is not so convenient to use the hand operated RF Match. Continuous operation is needed to adjust the impedance of the RF Match to achieve the process goal. While, the auto match can fill up the gap and owns the features of speediness, automatism, reliability, high efficiency, accuracy, saving labor and time. The optional RF systematic detection module can real time detect the system’s forward power, reflect power, standing wave ratio, RF signal peak voltage, current, DC bias voltage, An in so doing it can make you detect and decrease the process variety.
Features:
1 Strengthened thin film plating and etching process
2 Optimized RF Match arithmetic to speed up the matching time
3 Reduce the standing-wave ratio and the reflect ratio utmost
Specification:

Power Output Range	0-500W
RF Operating Frequency	13.56MHZ
Reflect Power	≤3W
Matching time	≤3S
Transmission efficiency	＞90%
Power	AC220V/50-60HZ
RF input connector	N type
RF output connector	UHF
Control model	automatic or manual operation
Preset points	7
Matching impedance range	Real part 0-80Ω imaginary part -j200~ +j200 (can be adjusted according to load impedance)
Size	340X230X130 MM
Weight	5.5KG
Cooling method	Forced air

Transaction process

After-sales Service

1.We provide one year warranty for our equipment (Except the quick-wear part),Equipment damage or malfunction during the guarantee period due to equipment quality reasons, all be free maintenance.After the warranty expires, still offer lifetime and high quality service.

2.In case of failure in the process of equipment used, our company will make a deal as soon as possible, to ensure the normal operation of equipment.

3.Our company provide free equipment operation training and simple troubleshooting and maintenance training.

4.My company's technical staff can provide door-to-door service (product installation, debugging, maintenance, technical advice and instructions, etc.).

5.Our company provides transport services, packaging are carried out in accordance with the safety standard packing.Random complete technical data (user manual, maintenance manuals, relevant materials and accessories, random tools, etc.).

6.All the equipment has the CE certificate.

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500W RF generator with match