Description：Designed for annealing semiconductor or solar cell substrates.
The PT-TRTP1000-S110LK1W rapid heating RTP annealing furnace is a tube type furnace with a high vacuum degree for rapid heat treatment, equipped with a quartz cavity and vacuum flange. It is heated by a halogen lamp, with a heating rate of up to 50 ℃/second and PID automatic control. It is designed specifically for annealing semiconductor or solar cell substrates. It belongs to a type of Sliding tube furnace.
Real photos of rapid heating RTP annealing furnace
|Rapid heating RTP annealing furnace
|LED (heating curve time setting is in seconds)
|Open type and slide type
|Furnace tube size
|OD110 outer diameter
Furnace: Voltage: 380 V; Frequency: 50 Hz; Three phase;
Vacuum pump: 220V 50Hz European standard plug
|Design and match according to actual needs
|30 segment high-precision digital programmable temperature controller
Video inspection before shipment, payment upon receipt
1. The furnace is a sliding open type;
2. The heating element is a halogen lamp;
3. The quartz tube is open at one end and closed at the other end;
4. Two air inlets and one air outlet on the flange;
5. Equipped with digital vacuum gauge
6. There is a baffle valve on the flange connected to the vacuum pump of DRV10, and the vacuum degree of the furnace tube is pumped to a cold state of 10Pa;
7. Connect a quartz bracket with a flange as shown in the following figure;
8. There is a simple nitrogen float and oxygen float flow meter on the box, with a maximum flow rate of 500ml/min.
1.We provide one year warranty for our equipment (Except the quick-wear part),Equipment damage or malfunction during the guarantee period due to equipment quality reasons, all be free maintenance.After the warranty expires, still offer lifetime and high quality service.
2.In case of failure in the process of equipment used, our company will make a deal as soon as possible, to ensure the normal operation of equipment.
3.Our company provide free equipment operation training and simple troubleshooting and maintenance training.
4.My company's technical staff can provide door-to-door service (product installation, debugging, maintenance, technical advice and instructions, etc.).
5.Our company provides transport services, packaging are carried out in accordance with the safety standard packing.Random complete technical data (user manual, maintenance manuals, relevant materials and accessories, random tools, etc.).
6.All the equipment has the CE certificate.
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