Description：Dual Zone Quartz tubular furnace is a CE certified and ready to pass UL/CSA certification spiltable dual zone Tube furnace with 80mm diameter quartz tube, mechanical vacuum pump and four channel gas flowing system. It can achieve a maximum vacuum up to 10-2 torr and mix 1-3 types of gases for CVD or diffusion.
|Power||208-240VAC, 50/60Hz, single phase, 2.5KW ( 20A Breaker required)|
Max. Temperature: 1200°C
Continuous Temperature: 1000°C
|Heating Zone||Two Zones: 200 mm (8") for each zone and total 400 mm heating zone length|
|Constant Temperature Zone||
If two zones are set at the same temperature, constant temperature zone is 10" (250 mm)
long with a temperature discrepancy of +/- 1°C.
If using only one zone (center zone), constant temperature zone is 4.3" (110 mm) long
with a temperature discrepancy of +/- 1°C.
|Max. Heating Rate||<= 20 °C /min (20 °C /min below 800°C; <5 °C /min over 1000°C)|
|Tube Size and material||Quartz Tube: 80 ODx 72 IDx 1000 L|
|Temperature Accuracy||+/- 1°C|
|Heating Elements||Fe-Cr-Al Alloy doped by Mo|
Two precision temperature controllers to control two zones separately.
PID automatic control with 30 programmable segments for precise control of
heating rate, cooling rate and dwell time.
Built in overheating & broken thermocouple protection.
Over temperature protection and alarm allows for operation without attendant(s).
+/- 1 ºC temperature accuracy.
RS485 Communications Port.
|Gas Mix Station||
Four precision mass flow controller ( MFC) with digital display
· MFC 1: Control range from 0~100 sccm
· MFC 2: Control range from 0~200 sccm
· MFC 3: Control range from 0~200 sccm
· MFC 4: Control range from 0~500 sccm
Gas route: 4 routes
Flowing rate accuracy: 0.2% accuracy
Gas inlet and outlet: 1/4" swagelok tube connector
One gas mixing tank installed on bottom case with liquid release valve.
Each gas route with SS needle valve to on-off control independently.
120 L/m Rotary Vane Vacuum Pump with Oil Trap (220V single phase) and
stainless steel hose tube are included for connecting to tube furnace.
Max. achievable vacuum pressure is 10^-2 torr.
Power Connection:9 pins D-sub connector.
Power Adapter:One 24V,1A DC power adapter is included and ready to use.
Input voltage for the adpter is 110~240V.
Measurement Range:3.8x10-5 to 1125 Torr.
Display:Digital display (20x14mm) with measurement unit torr
Gauge Fitting:Small Foot-Print with 1/8"NPT fitting
Dimensions:46mm×28mm×126mm ( L x W x H)
1.We provide one year warranty for our equipment (Except the quick-wear part),Equipment damage or malfunction during the guarantee period due to equipment quality reasons, all be free maintenance.After the warranty expires, still offer lifetime and high quality service.
2.In case of failure in the process of equipment used, our company will make a deal as soon as possible, to ensure the normal operation of equipment.
3.Our company provide free equipment operation training and simple troubleshooting and maintenance training.
4.My company's technical staff can provide door-to-door service (product installation, debugging, maintenance, technical advice and instructions, etc.).
5.Our company provides transport services, packaging are carried out in accordance with the safety standard packing.Random complete technical data (user manual, maintenance manuals, relevant materials and accessories, random tools, etc.).
6.All the equipment has the CE certificate.