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The tubular PECVD (Plasma Enhanced Chemical Vapor Deposition) electric furnace, also known as the plasma enhanced chemical vapor deposition tubular furnace, has high application value in the photovoltaic industry. Let's take a look at the application of tubular PECVD electric furnaces in the photovoltaic industry!
Commonly used tube PECVD electric furnace (click on the image to view product details)
1. Application
Preparation of anti reflective film:
Deposition of SiNx anti reflection film on crystalline silicon solar cells, adjusting the thickness and refractive index of the SiNx film, utilizing the principle of light interference to achieve anti reflection effect, improve photoelectric conversion efficiency, and protect the solar cell.
The hydrogen element in SiNx thin films can effectively passivate dislocations and dangling bonds on the silicon surface, improve carrier mobility, and protect the silicon wafer from contamination.
Preparation of transparent conductive film:
ITO (indium tin oxide) thin film plays a role in conductivity and transparency in photovoltaic modules.
2. Advantages
Low temperature sedimentation:
PECVD can efficiently deposit thin films in low-temperature environments, making it suitable for applications that require high thermal stability of substrate materials.
High purity film:
By finely controlling the composition and process parameters of the reaction gas, PECVD can generate thin films with good uniformity and high purity.
Multi material deposition capability:
This technology can deposit various materials such as SiO2, Si3N4, and Al2O3, expanding the application range of photovoltaic cells.
Precise control of thin film deposition:
PECVD technology can achieve control over the composition, structure, and properties of thin films, meeting the needs of different application scenarios.
Efficient sedimentation rate:
By using radio frequency glow technology, the deposition rate of the film has been greatly improved, and the deposition rate can reach a high level.
High area uniformity:
Good multi-point RF feeding technology, uniform gas path distribution, heating technology, etc., enable the film uniformity index to reach a high level.
High process stability:
The highly stable equipment ensures a continuous and stable production process.
Environmentally friendly:
The low-temperature sedimentation process reduces energy consumption and emissions of harmful substances.
Rotating tilted tube PECVD electric furnace (click on the image to view product details)
Overall, tubular PECVD electric furnaces play an important role in the photovoltaic industry, and their high efficiency, precision, and environmental friendliness make them one of the important equipment for preparing high-performance solar cells. With the continuous advancement and innovation of technology, PECVD equipment will become more efficient, intelligent, and environmentally friendly, making greater contributions to the sustainable development of the photovoltaic industry.Click to learn more PECVD devices! Or click on online customer service to learn more about product information!
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